| United States Patent | 5,328,676 |
| Gruen | Jul. 12, 1994 |
| Inventors: | Gruen; Dieter M. (1324 59th St., Downers Grove, IL 60515). |
| Appl. No.: | 995,456 |
| Filed: | Dec. 22, 1992 |
| Intl. Cl.: | C01B 31/06; |
| U.S. Cl.: | 423/446.; 204/157.47; |
| Field of Search: | 249;523;460 |
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| 4,629,631 | Dec., 1986 | Dearnaley | 427/ 38 |
| 4,634,600 | Jan., 1987 | Shimizu et al. | 427/523 |
| 5,132,105 | Jul., 1992 | Remo | 423/446 |
| 5,209,916 | May, 1993 | Gruen | 423/446 |
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A method of forming synthetic diamond on a substrate. The method involves providing a substrate surface covered with a fullerene or diamond coating, positioning a fullerene in an ionization source, creating a fullerene vapor, ionizing fullerene molecules, accelerating the fullerene ions to energies above 250 eV to form a fullerene ion beam, impinging the fullerene ion beam on the substrate surface and continuing these steps to obtain a diamond film thickness on the substrate.