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United States Patent 5,328,676
GruenJul. 12, 1994

Conversion of fullerenes to diamond

Inventors: Gruen; Dieter M. (1324 59th St., Downers Grove, IL 60515).
Appl. No.: 995,456
Filed: Dec. 22, 1992

Intl. Cl.:C01B 31/06;
U.S. Cl.:423/446.; 204/157.47;
Field of Search:249;523;460

References Cited

U.S. Patent Documents
4,559,901Dec., 1985Morimoto et al. 427/523
4,629,631Dec., 1986Dearnaley 427/ 38
4,634,600Jan., 1987Shimizu et al. 427/523
5,132,105Jul., 1992Remo 423/446
5,209,916May, 1993Gruen 423/446

Other References

Primary Examiner: Lewis; Michael
Assistant Examiner: Kalinchak; Stephen G.

Abstract

A method of forming synthetic diamond on a substrate. The method involves providing a substrate surface covered with a fullerene or diamond coating, positioning a fullerene in an ionization source, creating a fullerene vapor, ionizing fullerene molecules, accelerating the fullerene ions to energies above 250 eV to form a fullerene ion beam, impinging the fullerene ion beam on the substrate surface and continuing these steps to obtain a diamond film thickness on the substrate.

3 Claims, No Drawings


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